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Um Notes Search result for 'Um Notes': Paper Excerpts: ... 100 by 100-um. Each comb drive tooth is 2 by 2-um in cross-section and is separated laterally from the fixed base by having a 2-um, square cross-section and a 150-um suspension beam length. Since there is no actual device to test, suspension beams having a 2-um square cross-section and a 150-um suspension beam length. The resonant frequency of the comb drive ranged from 15 kHz to 55 kHz, as the beam lengths ranged from 200 um to 80 um. the beams are designed to have an average 2 by 2 um cross section area. ...
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Sources list for UM NOTES: DIE ZEIT, Schmid, Klaus-Peter, "Bonner buhlen um die Bauern", 11/1986, available at: [2]http://zeus.zeit.de/text/archiv/ 1986/11/Zt19860314_001_0004_PAgricultural Subsidies
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